| PartNumber | EZR32HG320F64R68G-B0 | EZR32HG320F64R67G-B0 | EZR32HG320F64R67G-B0R |
| Description | RF Microcontrollers - MCU 64 kB M0+, USB, +20 dBm EZRadioPRO, QFN48 wireless MCU | RF Microcontrollers - MCU 64 kB M0+, USB, +13 dBm EZRadioPRO, QFN48 wireless MCU | RF Microcontrollers - MCU 64 kB M0+, USB, +13 dBm EZRadioPRO, QFN48 wireless MCU |
| Manufacturer | Silicon Laboratories | Silicon Laboratories | Silicon Laboratories |
| Product Category | RF Microcontrollers - MCU | RF Microcontrollers - MCU | RF Microcontrollers - MCU |
| RoHS | Y | Y | Y |
| Core | ARM Cortex M0+ | ARM Cortex M0+ | ARM Cortex M0 |
| Operating Frequency | 142 MHz to 1.05 GHz | 142 MHz to 1.05 GHz | 142 MHz to 1.05 GHz |
| Data Bus Width | 32 bit | 32 bit | 32 bit |
| Program Memory Size | 64 kB | 64 kB | 64 kB |
| Data RAM Size | 8 kB | 8 kB | 8 kB |
| Maximum Clock Frequency | 25 MHz | 25 MHz | 25 MHz |
| ADC Resolution | 12 bit | 12 bit | 12 bit |
| Operating Supply Voltage | 1.98 V to 3.8 V | 1.98 V to 3.8 V | 1.98 V to 3.8 V |
| Maximum Operating Temperature | + 85 C | + 85 C | + 85 C |
| Package / Case | QFN-48 | QFN-48 | QFN-48 |
| Mounting Style | SMD/SMT | SMD/SMT | SMD/SMT |
| Program Memory Type | Flash | Flash | Flash |
| Series | EZR32HG | EZR32HG | EZR32HG |
| Brand | Silicon Labs | Silicon Labs | Silicon Labs |
| Data RAM Type | RAM | RAM | RAM |
| Interface Type | I2C, SPI, UART, USART, USB | I2C, SPI, UART, USART, USB | I2C, GPIO, SPI, UART, USART, USB |
| Number of I/Os | 25 I/O | 25 I/O | 25 I/O |
| Minimum Operating Temperature | - 40 C | - 40 C | - 40 C |
| Moisture Sensitive | Yes | Yes | - |
| Number of ADC Channels | 8 Channel | 8 Channel | 6 Channel |
| Number of Timers | 3 x 16 bit | 3 x 16 bit | 3 x 16 bit |
| Processor Series | EZR32HG320 | EZR32HG320 | - |
| Product Type | RF Microcontrollers - MCU | RF Microcontrollers - MCU | RF Microcontrollers - MCU |
| Factory Pack Quantity | 416 | 416 | 2000 |
| Subcategory | Wireless & RF Integrated Circuits | Wireless & RF Integrated Circuits | Wireless & RF Integrated Circuits |
| Supply Voltage Max | 3.8 V | 3.8 V | 3.8 V |
| Supply Voltage Min | 1.98 V | 1.98 V | 1.98 V |
| Tradename | EZR32 | EZR32 | EZR32 |